Accuracy limitations introduced by digital projection sources in profilometric optical metrology systems

摘要

The accuracy of profilometric optical metrology systems utilising Digital Fringe Projection (DFP) is analysed. An analytical model to describe theoretical accuracy limitation is derived and given as a function of object distance from the projector, projector resolution, projection angle and also object gradient. Associated limitations of the model are also discussed and analysed. The validity of the new model is demonstrated through practical experimentation.